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Microtribology related to MEMS-Concept, measurements, applications

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1 Author(s)
R. Kaneko ; NTT Appl. Electron. Lab., Tokyo, Japan

Novel micro-tribological techniques for the evaluation of surfaces have been developed. A point contact microscope having high resolution and using an ultralight load was developed to measure topographies, adhesive forces, hardnesses, and wear of surfaces. A controlled frictional force microscope was also developed to measure frictional force distributions without stick-slip motion. A scanning tunneling microscopy technique is used to evaluate lubricant monolayers. Micropatterning, micromachining, and point recording techniques are progressing with the technology of microtribology. It is concluded that microtribology is closely connected with the technology of micro-electromechanical systems (MEMS), and both technologies will progress with cooperative work

Published in:

Micro Electro Mechanical Systems, 1991, MEMS '91, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Date of Conference:

30 Jan-2 Feb 1991