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Embedded optical interconnections using thin film InGaAs metal-semiconductor-metal photodetectors

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5 Author(s)
Z. Huang ; Dept. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Y. Ueno ; K. Kaneko ; N. M. Jokerst
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The integration of InGaAs photodetectors embedded in a polymer interconnection waveguide on Si and ceramic electrical interconnection substrates has been demonstrated. The photodetector and substrate are independently fabricated and bonded, with subsequent waveguide integration. The embedding fabrication process, coupling, and bandwidth are reported at 1 Gbit/s.

Published in:

Electronics Letters  (Volume:38 ,  Issue: 25 )