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Automatic Control of Large-Scale Integrated Circuit Fabrication Processes-Process Control Algorithms

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1 Author(s)
Smith, E. ; IBM Corporation, VA

An automated manufacturing process control technique which reliably and repeatedly signals the end of integrated circuit fabrication is designed to make optimum use of either a process control operator who will inspect an on-line strip chart recording of process generated reflectance data and determine the optimum time to quench the fabrication process, or a small data processing system to signal the process end point. Results of automatically signaling the end of the process, via software implemented control algorithms for thin-film develop or etch processes, are presented.

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Components, Hybrids, and Manufacturing Technology, IEEE Transactions on  (Volume:3 ,  Issue: 3 )