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A Low-Cost Thin-Film Microcircuit Process

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3 Author(s)
D. Kerns ; Auburn Univ.,AL ; J. Kull ; V. Ruwe

A low-cost thin-film microcircuit conductor/resistor technology is developed which offers reduced material costs, a simple fabrication process, relatively low resistor temperature coefficients, and low resistance conductor metalization. The process uses copper for the conductors and Kanthal for the resistors; the process is compatible with certain selective etches to realize a subtractive process.

Published in:

IEEE Transactions on Components, Hybrids, and Manufacturing Technology  (Volume:2 ,  Issue: 2 )