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The Plasma Oxidation of Metals in Forming Electronic Circuit Components

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1 Author(s)
Johnson, M. ; Burroughs Corp., Paoli, PA

This study involves the fabrication of tantalum-pentoxide capacitors by other than the conventional thermal or aqueous electrolytic techniques. A new method of dielectric formation is described, and some of the results of the measurements performed on the passive devices are presented. This plasma-anodic process is then compared to the aqueous anodic processes, with the emphasis upon the compatibility of dry anodization techniques to vacuum techniques for the deposition of metallic thin films.

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Component Parts, IEEE Transactions on  (Volume:11 ,  Issue: 2 )