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Thin Films of Titanium and Titanium Oxide for Microminiaturization

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1 Author(s)
Huber, Franz ; Republic Aviation Company

Experimental results on the electrical properties of thin-film resistors, thin-film capacitors and thin-film diodes made of titanium/ titanium oxide/metal layers are described. The conduction phenomena in the three-layer titanium/ titanium oxide/metal structure are explained on the basis of a p-n Junction and p-i-n junction within the anodically formed oxide films.

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Component Parts, IEEE Transactions on  (Volume:11 ,  Issue: 2 )