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New Alumina Substrate for Hybrid Integrated Circuits

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4 Author(s)
Niwa, K. ; Fujitsu Labs, Ltd., Kawasaki, Japan ; Nakamura, J. ; Murakawa, K. ; Nakamura, M.

A new alumina substrate with an extremely smooth surface was developed. This new alumina substrate includes Cr203and MgO as the additives. Reliability data and characteristics of tantalum nitride or tantalum and tantalum oxide films on the new substrate were compared with those on the glazed alumina.

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Parts, Hybrids, and Packaging, IEEE Transactions on  (Volume:10 ,  Issue: 4 )