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Static Capacitance Calculations for a Surface Acoustic Wave Interdigital Transducer in Multilayered Media

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3 Author(s)

The static capacitance of an interdigital structure in multi-Iayered media has been calculated. Numerical results are given for a surface acoustic wave interdigital transducer on an oxidized silicon substrate with a piezoelectric overlay. The capacitance is derived in terms of the layer thicknesses for zero and infinite substrate resistivity.

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:26 ,  Issue: 4 )