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It is shown that the sheet resistance, and hence the resistivity, of very thin metal films (<100 å) can be determined conveniently and accurately by microwave measurements. Accuracy is limited by VSWR measurement, film-holder design, and short-circuit quality. DC and microwave resistivity measurements are given for gold films on cleaved mica.
Microwave Theory and Techniques, IEEE Transactions on (Volume:21 , Issue: 1 )
Date of Publication: Jan 1973