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Super self-aligned technology for backside contact solar cells. A route to low cost and high efficiency

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5 Author(s)
Verlinden, P. ; Microelectron. Lab., Univ. Catholique de Louvain, Belgium ; Lafontaine, B. ; Jacquemin, P. ; Goutain, E.
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A new technology is proposed for backside contact (BSC) silicon solar cells. This technology is self-aligned since only one photolithography step, without alignment, is required instead of the four to six steps required in previous technologies. Compared to a recently reported self-aligned process for BSC cells, this one eliminates the problem of compensated regions and has the advantages of a reduction of the emitter area, a passivation of silicon surface with thermal oxide between metal fingers, and a reduction in the metal-silicon contact area. As a consequence, this self-aligned technology offers great potential for the fabrication of high-efficiency solar cells at a low cost

Published in:

Photovoltaic Specialists Conference, 1990., Conference Record of the Twenty First IEEE

Date of Conference:

21-25 May 1990