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Framework for a defect reduction program

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3 Author(s)
Duffy, B. ; Digital Equipment Corp., Hudson, MA, USA ; Cumming, G. ; Fletcher, D.

A framework for defect reduction is presented which integrates management commitment, a focused organizational structure, state-of-the-art defect detection and analysis tools, and cooperation between the organizations that affect the quality of the material shipped from a wafer fab line. Considerations for organizational design, the role of the defect reduction engineer, and the defect reduction strategy are presented along with specific defect density, and yield improvement examples

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990

Date of Conference:

11-12 Sep 1990