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Measurements of charging in capacitive microelectromechanical switches

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2 Author(s)
Reid, J.R. ; Antenna Technol. Branch, Air Force Res. Lab., Hanscom AFB, MA, USA ; Webster, R.T.

Charge build up in capacitive microelectromechanical switches is measured during continuous cycling. Under unipolar cycling, charge rapidly builds up in the dielectric causing the switch control voltages to shift. However, under bipolar cycling, there is no net accumulated charge, but instead a decrease in the magnitude of the control voltages.

Published in:

Electronics Letters  (Volume:38 ,  Issue: 24 )