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New contributions to compound semiconductor technology for RF MEMS applications

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2 Author(s)
Hartnagel, Hans L. ; Inst. fuer Hochfrequenztechnik, Tech. Univ. Darmstadt, Germany ; Mutamba, K.

This work deals with contributions related to the use of micromachining technologies in the development of RF MEMS devices. Recent device developments involving III-V compound semiconductor MEMS technology are presented in connection with RF power measurement and the prospects of microwave power generation on the basis of micromachined lateral field-emitters.

Published in:

Semiconductor Conference, 2002. CAS 2002 Proceedings. International  (Volume:1 )

Date of Conference:

2002