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Multi-layered electrostatic film actuator

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2 Author(s)
Egawa, S. ; Inst. of Ind. Sci., Tokyo Univ., Japan ; Higuchi, T.

A multilayered electrostatic film actuator to realize a high force/weight ratio actuator applicable for large-scale machines is proposed. It has numerous films with plenty of small electrodes stacked and connected. In order to build this structure, an electrostatic actuator named the image charge stepping actuator has been developed. It utilizes image charges induced on a high resistance to produce force. It is fabricated on polymer films and a prototype of the multilayered actuator with four film actuators has been constructed. The fabricated multilayered actuator can produce a force of 0.4 N

Published in:

Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Date of Conference:

11-14 Feb 1990

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