By Topic

Environmentally rugged, wide dynamic range microstructure airflow sensor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

9 Author(s)
Ohnstein, T.R. ; Honeywell Inc., Bloomington, MN, USA ; Johnson, R.G. ; Higashi, R.E. ; Burns, D.W.
more authors

A silicon microstructure airflow sensor has been developed with a wide dynamic operating range and ruggedness for long-life operation in harsh environments. Platinum metallization is used for the airflow sensor because of its resistance to corrosion. Processing of thin-film platinum has been developed to achieve a high, stable value of the platinum temperature coefficient of resistance (TCR). The sensor design can be adjusted for sensitivity or range depending upon the application requirements. The airflow sensors were subjected to accelerated life testing to demonstrate the ability to maintain electrical stability and physical integrity in harsh environments. The life testing consisted of operation of the sensors with airflow in overpowered, high-temperature, and high-humidity conditions for extended periods. The sensors were also subjected to extended periods of time during which dust particles were added to the flow to simulate a dusty environment. The sensors performed well throughout the accelerated life testing with little change in output characteristics.<>

Published in:

Solid-State Sensor and Actuator Workshop, 1990. 4th Technical Digest., IEEE

Date of Conference:

4-7 June 1990