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A vacuum packaged surface micromachined resonant accelerometer

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7 Author(s)
Seshia, A.A. ; Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA ; Palaniapan, M. ; Roessig, T.A. ; Howe, R.T.
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This paper describes the operation of a vacuum packaged resonant accelerometer subjected to static and dynamic acceleration testing. The device response is in broad agreement with a new analytical model of its behavior under an applied time-varying acceleration. Measurements include tests of the scale factor of the sensor and the dependence of the output sideband power and the noise floor of the double-ended tuning fork oscillators as a function of the applied acceleration frequency. The resolution of resonant accelerometers is shown to degrade 20 dB/decade beyond a certain characteristic acceleration corner frequency. A prototype device was fabricated at Sandia National Laboratories and exhibits a noise floor of 40 μg/√(Hz) for an input acceleration frequency of 300 Hz.

Published in:

Microelectromechanical Systems, Journal of  (Volume:11 ,  Issue: 6 )

Date of Publication:

Dec 2002

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