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Metalloorganic solution deposition of ferroelectric PZT films

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3 Author(s)
Lipeles, R.A. ; Aerospace Corp., El Segundo, CA, USA ; Coleman, D.J. ; Leung, M.S.

The metallo-organic solution deposition (MOSD or sol-gel) technique can be used for preparing lead zirconate titanate (PZT) ceramics with a wide range of compositions and crystal structures for electrooptical applications. Film morphology is affected by the stoichiometry of the film, hydrolysis and polymerization of the sol-gel solution, and thermal treatment of the deposited material. The lattice parameter decreases with the amount of titanium in the PZT, in agreement with ceramic data. A slight initial excess of lead in the coating solution is found to improve film morphology. Unlike traditional powder ceramic processing techniques, MOSD permits the growth of small uniform grains that are conducive to achieving consistent electronic and optical properties. Results show that the properties of films prepared by the MOSD process can be tailored to meet the needs of device applications.<>

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Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:38 ,  Issue: 6 )