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Thin films for electrochemical sensoric interfaces

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8 Author(s)
Jakubec, A. ; Dept. of Microelectron., Slovak Tech. Univ., Bratislava, Slovakia ; Rehacek, V. ; Novotny, I. ; Ivanic, R.
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Planar microelectrochemical chips with thin-film electrodes (Au, Pt, Ag/AgCl) of different shapes and arrangements (compact, interdigitated array) on Si or glass substrates have been developed and fabricated Analyses of thin film roughness and surface morphology, by AFM and cyclic voltammetry have been performed. Resulting from this we found an optimal cleaning procedure of microelectrodes. The control and analysis of biosensing interfaces play a significant role in the design of biosensors and in optimization of their properties.

Published in:

Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on

Date of Conference:

14-16 Oct. 2002