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Investigations of structural and electronic properties of TiO2-doped layers deposited by hot target reactive magnetron sputtering method

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3 Author(s)
Prociow, E. ; Fac. of Microsystem Electron. & Photonics, Wroclaw Univ. of Technol., Poland ; Domaradzki, J. ; Kaczmarck, D.

In the paper structural and thermoelectrical properties of titanium oxides with palladium and gold dopants has been described The thermoelectric effect in the specimen doped by palladium has been found. Growing and nucleation of titanium films during deposition has been also discussed.

Published in:

Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on

Date of Conference:

14-16 Oct. 2002