Cart (Loading....) | Create Account
Close category search window
 

CMOS single-chip gas detection system comprising capacitive, calorimetric and mass-sensitive microsensors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Hagleitner, C. ; Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland ; Lange, D. ; Hierlemann, A. ; Brand, O.
more authors

A single-chip gas detection system fabricated in industrial CMOS technology combined with post-CMOS micro-machining is presented. The sensors rely on a chemo-sensitive polymer layer, which absorbs predominantly volatile organic compounds (VOCs). A mass-sensitive resonant-beam oscillator, a capacitive sensor incorporated into a second-order ΣΔ-modulator, a calorimetric sensor with low-noise signal conditioning circuitry and a temperature sensor are monolithically integrated on a single chip along with all necessary driving and signal conditioning circuitry. The preprocessed sensor signals are converted to the digital domain on chip. An additional integrated controller sets the sensor parameters and transmits the sensor values to an off-chip data recording unit via a standard serial interface. A 6-chip-array has been flip-chip packaged on a ceramic substrate, which forms part of a handheld VOC gas detection unit. Limits of detection (LOD) of 1-5 ppm n-octane, toluene or propan-1-ol have been achieved.

Published in:

Solid-State Circuits, IEEE Journal of  (Volume:37 ,  Issue: 12 )

Date of Publication:

Dec 2002

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.