Single-chip surface micromachined integrated gyroscope with 50/spl deg//h Allan deviation

The design principles of a mass-produced surface micromachined gyroscope are described. The device is integrated on a single 3 mm/spl times/3 mm chip with a 3-/spl mu/m BiCMOS process. It has a 4-/spl mu/m-thick polysilicon structure, 5-V 6-mA supply, 12.5-mV//spl deg//S sensitivity, 10 000:1 dynamic range, 30 000-gee shock survival, and -55/spl deg/C to +85/spl deg/C operating temperature.