Referenced Items are not available for this document.
The design principles of a mass-produced surface micromachined gyroscope are described. The device is integrated on a single 3 mm×3 mm chip with a 3-μm BiCMOS process. It has a 4-μm-thick polysilicon structure, 5-V 6-mA supply, 12.5-mV/°/S sensitivity, 10 000:1 dynamic range, 30 000-gee shock survival, and -55°C to +85°C operating temperature.
Published in:
Solid-State Circuits, IEEE Journal of
(Volume:37
,
Issue:
12
)
Date of Publication: Dec 2002
- Page(s):
- 1860 - 1866
- ISSN :
- 0018-9200
- INSPEC Accession Number:
- 7477068
- Digital Object Identifier :
- 10.1109/JSSC.2002.804345
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 16 December 2002
- Issue Date :
- Dec 2002
- Sponsored by :
- IEEE Solid-State Circuits Society
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