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Technological sources of charged particles with plasma emitters

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1 Author(s)
Bugaev, S.P. ; High Current Electron. Inst., Acad. of Sci. Tomsk, USSR

At present, ion and electron beams, extensively used in industry, usually have a small cross section. Presented are generators of ion and electron flows with a large cross section using plasma emitters. These devices have a wide range of currents and voltages and are designed for metallurgical treatment and microelectronics. The author discusses a technological source of ions based on the vacuum-arc excited by a constricted discharge electron-beam installation with a large cross-section beam for microelectronics technology, a high-power electron-energy complex for heat treatment of manufactured articles and a generator of a low-energy, high-current electron beam with a plasma anode

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Plasma Science, IEEE Transactions on  (Volume:19 ,  Issue: 5 )