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Plasma-aided manufacturing

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1 Author(s)
Shohet, J.Leon ; Eng. Res. Center for Plasma-Aided Manuf., Wisconsin Univ., Madison, WI, USA

The present and potential applications of plasma-aided manufacturing are discussed and described. Plasma-aided manufacturing is used for producing new materials with unusual and superior properties, for developing new chemical compounds and processes, for machining, and for altering and refining materials and surfaces. Plasma-aided manufacturing has direct applications to semiconductor fabrication, materials synthesis, welding, lighting, polymers, anticorrosion coatings, machine tools, metallurgy, electrical and electronics devices, hazardous waste removal, high-performance ceramics, and many other items in both the high-technology and the more traditional industries in the United States

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Plasma Science, IEEE Transactions on  (Volume:19 ,  Issue: 5 )