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Novel Love mode filters based on ZnO and SiO2/90° rotated ST-cut quartz crystal structure were fabricated. A comprehensive study was carried out to show the capabilities of such filters. The periodicity of the fingers is 50 μm and the thickness of the SiO2 and ZnO layers ranges from 0.2 to 7.2 μm. Electromechanical coupling coefficient, capacitance per unit wavelengths of finger pairs and temperature coefficient of frequency are studied in terms of thickness of the wave-guiding layers.
Date of Conference: 2002