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GaAs single-mode rib waveguides with reactive ion-etched totally reflecting corner mirrors

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2 Author(s)
Buchmann, P. ; Swiss Federal Institute of Technology, Zurich, Switzerland ; Kaufmann, H.

The fabrication and optical properties of reactive ion-etched, totally reflecting mirrors for single-mode GaAs rib waveguides are described. Low loss and orientation independance make the device useful in integrated optics, in order to increase packing density and to facilitate waveguide to fiber coupling. Results of displacement sensitivity calculations are also shown.

Published in:

Lightwave Technology, Journal of  (Volume:3 ,  Issue: 4 )

Date of Publication:

Aug 1985

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