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C2F6reactive ion-beam etching of LiNbO3and Nb2O5and their application to optical waveguides

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4 Author(s)
Bei Zhang ; University of California, San Diego, La Jolla, CA, USA ; S. Forouhar ; S. Huang ; W. Chang

Properties of C2F6(freon 116) reactive ion-beam etching (RIBE) of LiNbO3, Ti-indiffused LiNbO3, and sputter-deposited Nb2O5film on LiNbO3are reported. A maximum differential etching ratio of approximately 5:1 has been measured for LiNbO3and the AZ 1350B Shipley photoresist. We have used this etching technique to fabricate diffraction gratings on both Ti-indiffused LiNbO3and Nb2O5- LiNbO3waveguides with measured throughput efficiencies in excess of 85 percent.

Published in:

Journal of Lightwave Technology  (Volume:2 ,  Issue: 4 )