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Long pulse excimer laser excited by sequenced discharges

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2 Author(s)
Cohn, D.B. ; Northrop Research and Technology Center, Northrop Corporation, Palos Verdes Penninsula, CA, USA ; Komine, H.

An excimer laser with a total gain volume of 40 cm3is excited by sequential discharges between two independent electrode pairs sharing the same optical resonator. For gas mixtures typical of the XeCl species and depending upon the optical output coupling fraction, the laser pulse length is extended by factors of two to three with two discharges, as opposed to the case of a single discharge.

Published in:
Quantum Electronics, IEEE Journal of  (Volume:19 ,  Issue: 5 )

Date of Publication: May 1983

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