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Theoretical analysis of electron-beam-excited KrF laser performance: New F2concentration optimization

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5 Author(s)
Kannari, F. ; Engineering, Faculty if Science and Technology, Keio University, Yokohama, Japan ; Suda, A. ; Yamaguchi, Shigeru ; Obara, Minoru
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For an electron-beam-excited KrF laser, we analyzed theoretically the dependence of the performance characteristics on the excitation rate and initial F2concentration. According to the analysis of KrF* formation processes, KrF* relaxation processes, 248 nm absorption processes, and their individual efficiencies, a novel optimization method for initial F2concentrations is necessary instead of a conventional method of a "constant" F2burn-up rate. Then, we determined optimum F2concentration as a function of the excitation rate for excitation pulses of 20-500 ns FWHM. Finally, we obtained the scaling law for the intrinsic KrF laser efficiency.

Published in:

Quantum Electronics, IEEE Journal of  (Volume:19 ,  Issue: 2 )

Date of Publication:

Feb 1983

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