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Analysis of chemical degradation products in an e-beam pumped rare-gas halide laser

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1 Author(s)
Brannon, James H. ; Maxwell Laboratories, Inc., San Diego, CA, USA

Chemical degradation products created during the operation of an e -beam pumped, repetitively pulsed XeF laser with closed flow cycle capability are reported. From an initial lasing mixture of Ar/Xe/NF3, the degraded gas was found to contain N2F2(N2F4), CO2, nitrogen oxides, CF4, and SiF4. Gaseous species were identified by their infrared and ultraviolet absorption spectra. Also present was a solid material tentatively thought to consist of fluorocarbons and aluminum fluorides. The observed gas chemistry suggests methods for improving laser performance by prevention of contaminant buildup.

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Quantum Electronics, IEEE Journal of  (Volume:18 ,  Issue: 8 )