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A novel deposit/spin waveguide interconnection (DSWI) for semiconductor integrated optics

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4 Author(s)
Furuya, K. ; Tokyo Institute of Technology, Tokyo, Japan ; Miller, Barry I. ; Coldren, L.A. ; Howard, R.E.

We propose an efficient and simple optical interconnection between active semiconductor components by deposition and spin coating. Details of the waveguide design, the fabrication technique, and a promising material combination are given. Experimental results with an integrated laser-polyimide/SiOx( x \sim 2 ) waveguide combination demonstrate low-threshold (2.0 kA/cm2) laser operation and a low-loss waveguide interconnection (81 percent coupling efficiency) on a GaInAsP/InP chip.

Published in:

Quantum Electronics, IEEE Journal of  (Volume:18 ,  Issue: 10 )