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LiNbO3waveguide modulator with 1.2 µm thick electrodes fabricated by lift-off technique

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1 Author(s)
Pao-Lo Liu ; State University of New York at Buffalo, Amherst, NY, USA

In order to make efficient high-frequency electrooptic modulators, the microwave loss in the electrodes has to be minimized. A lift-off technique using chlorobenzene to harden the top of AZ1350-J photoresist was adopted to fabricate 1.2 μm thick metal electrodes. A 1 cm long, 15 μm wide strip electrode has a dc resistance of 11 Ω, which is substantially less than that of the 2000 Å thick electrodes routinely fabricated. A 1 cm long traveling-wave phase modulator consisting of a single waveguide was tested. The measured -3 dB bandwidth is 3.8 GHz.

Published in:

IEEE Journal of Quantum Electronics  (Volume:18 ,  Issue: 10 )