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High magnification unstable resonator excimer laser

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3 Author(s)
James, D. ; Lumonics Research Limited, Ontario, Canada ; McKee, Terrence J. ; Skrlac, W.

High brightness performance has been achieved in a UV preionized transverse discharge KrF excimer laser by using a high magnification unstable resonator configuration. The properties of laser brightness as a function of resonator magnification are examined.

Published in:

Quantum Electronics, IEEE Journal of  (Volume:15 ,  Issue: 5 )