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Laser-generated RC networks

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2 Author(s)
M. Saifi ; Western Electric Company, Inc., Princeton, NJ, USA ; O. Masopust

Laser machining is the basis of a new technique for manufacturing integrated RC networks. The technique involves the generation of resistance patterns by laser machining nonconductive paths in capacitor plates composed of polyester film metallized with 400 Å of zinc. The reliability of such networks under operating conditions is largely dependent upon the electrical isolation provided by the laser-machined line. Good adherence of the metal film at the edges of the machined line is required, with no loose metal particles. This entails careful control of the laser pulse intensity and spot overlap. A further restriction on the laser-machining parameters is imposed by the fact that the 6-μm-thick polyester film (the dielectric body of the network) should not be thermally damaged due to evaporating metal film. In this paper we discuss the laser-machining aspects and the electrical characteristics of the laser-generated networks.

Published in:

IEEE Journal of Quantum Electronics  (Volume:12 ,  Issue: 2 )