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Ion kinetics in low-pressure, electropositive, RF glow discharge sheaths

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3 Author(s)
Barnes, Michael S. ; IBM East Fishkill, Hopewell Junction, NY, USA ; Forster, John C. ; Keller, John H.

Ion kinetics in low-pressure (e.g., 1 mtorr), electropositive, RF glow discharge sheaths are studied using a Monte-Carlo-based computer simulation. The numerical model integrates particle trajectories using a spatially nonlinear, time-varying model of the electric field in the RF sheath. A scaling relationship is then discussed, relating the normalized ion energy spread to the ratio of ion sheath transit time to the RF period. The scaled numerical data shows good agreement with existing numerical and experimental data

Published in:

Plasma Science, IEEE Transactions on  (Volume:19 ,  Issue: 2 )

Date of Publication:

Apr 1991

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