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Magnetic anisotropy of Co-Cr thin films as a function of substrate temperature during deposition

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5 Author(s)
Mountfield, K.R. ; Carnegie Mellon University, Pittsburgh, Pennsylvania, USA ; Mitchell, P.V. ; Lee, J.W. ; Demczyk, B.G.
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A sequence of Co78Cr22films, 500 nm in thickness, was prepared by deposition on glass in a modified Varian D.C. magnetron S-gun sputtering system. The substrate temperature during deposition, Ts, was fixed at various values with an upper limit of 300°C. Specimens were examined by VSM, TM, FMR and TEM. Msrises significantly with increasing Ts, peaking at 200°C at 370 emu/cm3. The effective volume-averaged anisotropy drops for Ts>110°C from +1.6 KOe to progressively negative values (-4.3 KOe at 300°C). From FMR we find indications of the presence, in addition to the transition and bulk layers, of a highly negative anisotropy constituent (sim-11.5KOe anisotropy field). This resonance appears at Tsvalues of 150°C and above. TEM plane and cross-section views taken on a Ts= 150°C specimen show islands composed of tilted columns within the bulk. For vertical recording, specimens prepared at Tsvalues between 50 and 100°C are recommended. On the other hand, for longitudinal recording applications, films prepared at Tsvalues above 250°C would seem to be appropriate.

Published in:

Magnetics, IEEE Transactions on  (Volume:23 ,  Issue: 5 )

Date of Publication:

Sep 1987

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