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Magnetic properties of compositionally modulated nitride amorphous alloy films

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3 Author(s)
Sakakima, H. ; Matsushita Electric Industrial Co., Ltd., Osaka, Japan ; Osano, K. ; Omata, Y.

Superstructured Co-based amorphous alloy films comprising non-nitride and nitride layers are prepared by sputtering alternatingly in Ar and in N2mixed Ar gas. The layered structure changes into compositionally modulated structure by high temperature annealing above 400°C. The films with modulation wave length λ < 600 Å show appreciable soft magnetic properties. The saturation magnetization, Curie temperature and crystallization temperature increase by nitriding. The obtained compositionally modulated films mainly composed of Co-Nb-N are found to have high saturation magnetization (4piM_{s} approx 10,000G) as well as high permeability (mui geq 1,000at 10 MHz) and show high thermal stability even up to 580°C, which was impossible to attain for conventional amorphous films.

Published in:

Magnetics, IEEE Transactions on  (Volume:23 ,  Issue: 5 )

Date of Publication:

Sep 1987

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