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Low specific capacitance by ion-beam oxidation of Niobium-based Josephson tunnel junctions

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1 Author(s)
R. Herwig ; Universität Karlsruhe, Hertzstrasse, Karlsruhe, West Germany.

Josephson tunnel junctions were fabricated on niobium by ion-beam oxidation where an oxide thickness independent of the processing time can be achieved. Low specific capacitance of about 5 µF/ cm2at a maximum current density of 1 kA/cm2have been measured via junction and interferometer resonances. A model for the structure of those low-capacitance barriers is proposed.

Published in:

IEEE Transactions on Magnetics  (Volume:22 ,  Issue: 2 )