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Influence of temperature on magnetic properties of ion-beam sputter-deposited perpendicular magnetic media

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2 Author(s)
Maloney, W. ; Polaroid Corporation, Cambridge, MA ; Lustig, C.D.

Co-Cr perpendicular magnetic media deposited by ion-beam sputter methods show magnetic properties similar to those obtained by radio frequency (RF) sputtering. Coercivity, ratio of perpendicular to parallel squareness, and X-ray orientation are strikingly improved when the substrate is heated. Independent control of substrate temperature makes ion-beam sputter deposition an attractive candidate for deposition of perpendicular magnetic films.

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Magnetics, IEEE Transactions on  (Volume:20 ,  Issue: 4 )