Influence of temperature on magnetic properties of ion-beam sputter-deposited perpendicular magnetic media

Co-Cr perpendicular magnetic media deposited by ion-beam sputter methods show magnetic properties similar to those obtained by radio frequency (RF) sputtering. Coercivity, ratio of perpendicular to parallel squareness, and X-ray orientation are strikingly improved when the substrate is heated. Independent control of substrate temperature makes ion-beam sputter deposition an attractive candidate for deposition of perpendicular magnetic films.