By Topic

a-Si:H films deposited at high rates in a 'VHF' silane plasma: potential for low-cost solar cells

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

10 Author(s)

The very-high-frequency glow discharge (VHF-GD) is a high-rate deposition method for amorphous silicon based on the use of plasma excitation frequencies in the range 30-150 MHz. Thereby the high-energy tail of the electron energy density function is enhanced, increasing the deposition rate R, without a corresponding increase in electric field and ion bombardment. An extensive set of optoelectronic properties ( sigma dark, Ea, sigma ph, CPM, PDS, TOF, SSPG, steady-state Hecht plot) is presented for samples prepared by VHF-GD for the above frequency range and R approximately=12-15 AA/s. Emphasized are hole transport properties. With values of ( mu D tau t)h by TOF (time of flight) around 3*10-10 but up to approximately=5*10-9 cm2/V, VHF-GD is judged to be adequate for solar-cell applications.

Published in:

Photovoltaic Specialists Conference, 1988., Conference Record of the Twentieth IEEE

Date of Conference:

1988