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A 1M word/spl times/1-bit/256K word/spl times/4-bit CMOS DRAM with a test mode is described. The use of an improved sense amplifier for the half-V/SUB CC/ sensing scheme and a novel half-V/SUB CC/ voltage generator have yielded a 56-ns row access time and a 50-/spl mu/A standby current at typical conditions. High /spl alpha/-particle immunity has been achieved by optimizing the impurity profile under the bit line, based on a triple-layer polysilicon n-well CMOS technology. The RAM, measuring 4.4/spl times/12.32 mm/SUP 2/, is fit to standard 300-mil plastic packages.