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A concise analytical expression for switch-induced error voltage on a switched capacitor is derived from the distributed MOSFET model. The result can be interpreted in terms of a simple lumped equivalent circuit. With this expression the dependence is investigated of the error voltage on process parameters and on switch turnoff rate, source resistance, and other circuit parameters. These results can be used to quickly predict the error voltage. The analytical expression is in close agreement with computer simulations and experiments.