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Expressions assuming a simple square-law MOSFET model are presented for the low-frequency harmonic distortion of an enhancement-mode source follower. These theoretical results are compared to measurements of several integrated versions of the three circuit types. For a given fabrication process, the main factors determining the amount of distortion for all three circuits are the quiescent output voltage and the output swing; to a first order, the distortion does not depend on bias current or device geometries. The distortion of an enhancement-mode source follower has a similar behavior to that of an enhancement-load inverter with the same output quiescent voltage and output swing; both distortions are nearly proportional to the body-effect coefficient. For the same output quiescent voltage and output swing, the distortion of the depletion-load inverter is the highest among the three circuits, but is practically independent of process parameters.