A new termination technique for diffused resistors is developed. This termination provides low contact resistance and little misalignment error. Data indicate that the termination is accurate to at least 10 bit. This makes possible the realization of D/A or A/D converters exceeding 10-bit performance while staying with low cost standard diffusion process.
Published in:
Solid-State Circuits, IEEE Journal of
(Volume:15
,
Issue:
6
)
Date of Publication: Dec 1980