Cart (Loading....) | Create Account
Close category search window

A new buried-oxide isolation for high-speed high-density MOS integrated circuits

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)

The BO-MOS has an extensive oxide-isolated structure which isolates not only the sidewall but also the bottom of the source and drain diffusions, similar to SOS-MOS, and yet it retains high carrier mobility and low-leakage junction properties. A 1024-bit static NMOS RAM is successfully fabricated using photomasks of a redesigned high-density bulk NMOS RAM (Fujitsu MBM8115). The ring oscillator circuit fabricated using existing SOS-CMOS photomasks shows an equivalent speed-power performance to the original SOS device. The fabrication sequence for the BO-MOS requires the same number of photomasks as for the conventional MOS devices.

Published in:

Solid-State Circuits, IEEE Journal of  (Volume:13 ,  Issue: 4 )

Date of Publication:

Aug. 1978

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.