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Capacitance models for integrated circuit metallization wires

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2 Author(s)

New concepts are introduced relating aspects of circuit theory to the multicapacitances which can be obtained from a computer program for multiconductor geometries. These concepts are applied to the wiring of an integrated circuit chip. Capacitances are found for crossovers, vias, and right angle bends for a realistic geometry.

Published in:

IEEE Journal of Solid-State Circuits  (Volume:10 ,  Issue: 6 )