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Application of silicon crystal orientation and anisotropic effects to the control of charge spreading in devices

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2 Author(s)

Advantageous use of the silicon, diamond cubic crystal structure is described from the aspect of orientation-dependent etching. The use of this technology can affect device characteristics, device and circuit isolation, circuit element densities, and process control. Several laboratories have reported advantageous use of }100{ oriented silicon. This paper discusses the advantageous use of both {100} and {110} silicon orientations. In particular, the {110} technology is discussed from a high packing density aspect as applied to the processing and characteristics of silicon diode array targets with improved television blooming control.

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Solid-State Circuits, IEEE Journal of  (Volume:9 ,  Issue: 3 )