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Nickel electroplated widely tunable micromachined capacitor

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2 Author(s)
Gallant, A.J. ; Sch. of Eng., Durham Univ., UK ; Wood, D.

Nickel electroplating is used to fabricate a widely tunable micromachined capacitor. From an initial capacitance of 0.7 pF, the device has a tuning ratio of 5.1:1 including parasitics: this is better than twice any previously reported figure for such devices. A process flow is presented which includes electrode surface roughening for stiction avoidance.

Published in:

Electronics Letters  (Volume:38 ,  Issue: 22 )