Referenced Items are not available for this document.
Description of the fabrication and characteristics of a micromachined metal thin-film pressure sensor for working at high temperatures is presented. The proposed pressure sensor consists of a Cr thin-film, patterned on a Wheatstone bridge configuration, sputter-deposited onto thermally oxidised Si membranes with an Al interconnection layer. This sensor has the advantages of high sensitivity, high temperature operation and is suitable for batch process.
Published in:
Electronics Letters
(Volume:38
,
Issue:
22
)
Date of Publication: 24 Oct 2002
- Page(s):
- 1344 - 1346
- ISSN :
- 0013-5194
- INSPEC Accession Number:
- 7463988
- Digital Object Identifier :
- 10.1049/el:20020933
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 10 December 2002
- Issue Date :
- 24 Oct 2002
- Sponsored by :
- Institution of Engineering and Technology
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