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Description of the fabrication and characteristics of a micromachined metal thin-film pressure sensor for working at high temperatures is presented. The proposed pressure sensor consists of a Cr thin-film, patterned on a Wheatstone bridge configuration, sputter-deposited onto thermally oxidised Si membranes with an Al interconnection layer. This sensor has the advantages of high sensitivity, high temperature operation and is suitable for batch process.
Date of Publication: 24 Oct 2002