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40-GHz coplanar waveguide bandpass filters on silicon substrate

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7 Author(s)
Chan, K.T. ; Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan ; Chen, C.Y. ; Chin, A. ; Hsieh, J.C.
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We report a very simple process to fabricate high performance filter on Si at 40 GHz using proton implantation. The filter has only -3.4-dB loss at peak transmission of 40 GHz with a broad 9-GHz bandwidth. In sharp contrast, the filter on 1.5-μm SiO2 isolated Si has much worse transmission and reflection loss. This is the first demonstration of high performance filter at the millimeter-wave regime on Si with process compatible with current VLSI technology.

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Microwave and Wireless Components Letters, IEEE  (Volume:12 ,  Issue: 11 )